Title:
【発明の名称】集積フォトカソード
Document Type and Number:
Japanese Patent JP2001507498
Kind Code:
A
Abstract:
A transferred-electron photocathode or other opto-electronic device having one light-receiving side and one electronic side, in which multiple photocathodes are processed concurrently on a wafer for front and back side contacts and anti-reflection layers. After the wafer-level processing, the individual cells are diced, and each is placed in a rectangular recess formed in a window body with the light-receptive part of the photocathode facing the window. The integration is aided by several novel processes including coining a chip recess into a window, selective etching of titanium over chromium, and using a single metal sheet member for electrically contacting the photocathode, forming part of the vacuum envelope, and providing an exterior electrical tab.
Inventors:
Costello, Kenneth A
Shrimp, bur W
Weiss, Robert Y
Shrimp, bur W
Weiss, Robert Y
Application Number:
JP51973697A
Publication Date:
June 05, 2001
Filing Date:
November 05, 1996
Export Citation:
Assignee:
INTEVAC INCORPORATED
International Classes:
H01J9/12; H01J1/34; H01J31/50; H01J40/06; H01J43/08; H01L21/306; (IPC1-7): H01J40/06; H01J1/34; H01J9/12; H01J43/08; H01L21/306
Attorney, Agent or Firm:
Sumio Takeuchi (1 outside)