【発明の名称】ガスのプラズマ処理装置 - AA Technology Public Limited Company

Title:

【発明の名称】ガスのプラズマ処理装置

Document Type and Number:

Japanese Patent JP2001520109

Kind Code:

A

Abstract:

An apparatus (1) for the processing of gaseous media by means of a plasma wherein there is included at least one electrode (16, 14) which is maintained in position in relation to another by one or more insulating support structures (7, 8) made of a micaceous glass material.

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Inventors:

Weeks David Michael
Seagull David Leslie

Application Number:

JP2000516758A

Publication Date:

October 30, 2001

Filing Date:

October 09, 1998

Export Citation:

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Assignee:

AA Technology Public Limited Company

International Classes:

F01N3/08; B01D53/32; B01D53/92; B01J19/08; (IPC1-7): B01D53/32; B01J19/08; F01N3/08

Attorney, Agent or Firm:

Minoru Nakamura (9 outside)

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