Title:
【発明の名称】繊維光学圧力センサー(および変形形態)および可撓性反射部材の製造方法
Document Type and Number:
Japanese Patent JP2002518667
Kind Code:
A
Abstract:
The inventions relate to measurements of a hydrostatic and/or fast-changing pressure by optical means, and are suitable for aerodynamic investigations of aircraft and small spacecraft, in robotics, including small force micro-clamps, in remote pressure monitoring (in wells, vessels, cylinders), in medicine and medical and biological investigations, hydroacoustics, security systems. The object is to improve the sensitivity and enhance the temperature and vibration stability of a pressure sensor. The pressure sensor is a low Q-factor Fabry-Perot cavity/interferometer 6 at the end of a single-mode optical fiber 1 with the 4% Fresnel reflection from the silica glass/air interface. Another movable mirror of the cavity is formed by an end face 10 of a short (1-3 mm) optical fiber length 9 having a small inertial mass and inserted into the center of a flexible membrane 9 of 500-700 mu m in diameter, tightly sealing a small air volume of about 1-3 mm<3> inside a second capillary 3 with the external diameter of 0.5 to 0.9 mm. End faces 7 and 10 of the optical fibers 1 and 9 forming the Fabry-Perot cavity 6 with a gap of about 50 mu m are placed inside the capillary 2 with the internal diameter of about 145 mu m. The temperature stability of the sensor is DELTA P/ DELTA T APPROX 0.001 atm/ DEG C.
Inventors:
Dianob, Evgeny Miku Hylovich
Beroborob, Mikhail Ivanovich
Bubu Knob, Miku Hairu Miku Hailovich
Sem Jonab, Sergey Rubovic
Beroborob, Mikhail Ivanovich
Bubu Knob, Miku Hairu Miku Hailovich
Sem Jonab, Sergey Rubovic
Application Number:
JP2000555068A
Publication Date:
June 25, 2002
Filing Date:
March 24, 1999
Export Citation:
Assignee:
Naukunito Centro Borokonnoji Optiki Pre-Institut of Shea Fissi Rossi Koi Academia Nauk
International Classes:
G01L11/02; G01L9/00; G01L23/06; (IPC1-7): G01L9/00
Attorney, Agent or Firm:
Akira Asamura (3 outside)