Title:
【発明の名称】赤外線ボロメータ
Document Type and Number:
Japanese Patent JP2002533666
Kind Code:
A
Abstract:
An inventive infrared bolometer (200) capable of structurally compensating for a slop of a post, which comprises: an active matrix level (110) including a substrate (112) and a pair of connecting terminals (114); a support level (120) provided with a pair of bridges (122) and a pair of conduction lines (124), whereby each of bridges (122) is provided with an anchor portion (122a), a leg portion (122b) and an elevated portion (122c), the anchor portion (122a) being affixed to the active matrix level (110) wherein the elevated portion (122c) of each of the bridges including an inner part (301) cantilevered from an outer part (302); an absorption level (130) including a bolometer element (132) surrounded by an absorber (131); and a pair of posts (140) positioned on top of the inner part (301) of the bridge (122), each of the posts (140) including an electrical conduit (142), wherein each ends of the bolometer element (132) is electrically connected to the respective terminal (114) through the respective conduit (142) and the respective conduction line (124).
Inventors:
Ju, Sang, Baek
Application Number:
JP2000589915A
Publication Date:
October 08, 2002
Filing Date:
December 18, 1998
Export Citation:
Assignee:
Dew Electronics Company Limited
International Classes:
G01J1/02; G01J5/02; G01J5/20; (IPC1-7): G01J5/02; G01J1/02
Domestic Patent References:
| JPH10185681A | 1998-07-14 | |||
| JPH08129875A | 1996-05-21 | |||
| JPH07198474A | 1995-08-01 | |||
| JP2001516443A | 2001-09-25 |
Attorney, Agent or Firm:
Youichi Oshima