Title:
【発明の名称】エタロンベース出力カプラを備えた線狭帯域化F2レーザ
Document Type and Number:
Japanese Patent JP2002533939
Kind Code:
A
Abstract:
An F2 laser having an etalon-based line narrowing output coupler and a technique for tuning the laser. The etalon based output coupler is adjusted to preferentially reflect a percentage of light at or near the spectral maximum of one of the primary F2 spectral lines and to not reflect light at the other primary F2 spectral line. Thus, a selected range of the selected line is preferentially amplified in the gain medium and the other line is transmitted out of the laser cavity and, therefore, receives no amplification and is suppressed. The result is substantial narrowing in the preferred embodiment of the 157.630 nm line and effective suppression of the 157.523 nm line. Substantial improvement in line narrowing of 157.630 nm line results from a wavelength selective properties of etalon based line-narrowing output coupler.
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Inventors:
Elshoff Alexander Eye
Application Number:
JP2000590258A
Publication Date:
October 08, 2002
Filing Date:
December 09, 1999
Export Citation:
Assignee:
Cymer, Inc.
International Classes:
G03F7/20; H01S3/02; G02B5/28; H01S3/03; H01S3/036; H01S3/08; H01S3/081; H01S3/0971; H01S3/098; H01S3/1055; H01S3/137; H01S3/223; H01S3/225; H01S3/23; H01S3/139; (IPC1-7): H01S3/137; G02B5/28
Domestic Patent References:
| JPH10308547A | 1998-11-17 |
Foreign References:
| WO1998056092A1 | 1998-12-10 |
Other References:
KAKEHATA, M.; UEMATSU, T.; KANNARI, F.; OBARA, M.: "Efficiency characterization of vacuum ultraviolet molecular fluorine (F2) laser (157 nm) excited by", QUANTUM ELECTRONICS, IEEE JOURNAL OF, vol. Volume 27, Issue 11, Nov. 1991, JPN7009001011, pages 2456 - 2464, ISSN: 0001258614
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)