Title:
GCIBサイズ診断および加工品処理
Document Type and Number:
Japanese Patent JP2004504691
Kind Code:
A
Abstract:
Methods and apparatus for measuring the distribution of cluster ion sizes in a gas cluster ion beam (GCIB) and for determining the mass distribution and mass flow of cluster ions in a GCIB processing system without necessitating the rejection of a portion of the beam through magnetic or electrostatic mass analysis. The invention uses time-of-flight measurement to estimate or monitor cluster ion size distribution either before or during processing of a workpiece. The measured information is displayed and incorporated in automated control of a GCIB processing system.
Inventors:
Mack, Michael, Yi.
Torti, Richard, Pea.
Torti, Richard, Pea.
Application Number:
JP2002512443A
Publication Date:
February 12, 2004
Filing Date:
July 13, 2001
Export Citation:
Assignee:
Epion Corporation
International Classes:
H01J49/40; C23C14/22; C23C14/52; C23C14/54; H01J37/304; H01J49/06; (IPC1-7): H01J49/40; H01J49/06
Attorney, Agent or Firm:
Takenori Hiroe
Kenichi Uno
Kenichi Uno