Title:
清浄化組成物、製造法及び使用法
Document Type and Number:
Japanese Patent JP2004509219
Kind Code:
A
Abstract:
A cleaning composition is provided according to the invention. The cleaning composition includes a product of mixing an acid component, a source of phosphoric acid component, and an oxidant component. The molar ratio of oxidant component to phosphoric acid component is preferably between about 2:1 and about 1:2, and the molar ratio of oxidant component to acid component is preferably between about 1:3 and about 1:5. A method of cleaning an aluminum surface is provided. The method includes a step of applying the cleaning composition to an aluminum surface, and rinsing the cleaning composition from the aluminum surface.
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WO/2022/159183 | METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES |
Inventors:
Smith, Kim Earl.
Hay, Robert Dee. Pee.
Beth, Michael Yee.
Hoyt, Jerry Dee.
Hay, Robert Dee. Pee.
Beth, Michael Yee.
Hoyt, Jerry Dee.
Application Number:
JP2002527346A
Publication Date:
March 25, 2004
Filing Date:
July 26, 2001
Export Citation:
Assignee:
Echo Love Incorporated
International Classes:
C11D7/08; C11D1/02; C11D1/62; C11D1/722; C11D1/88; C11D3/02; C11D3/39; C11D7/16; C11D7/18; C11D7/20; C11D7/34; C11D11/00; C23F3/03; C23G1/12; (IPC1-7): C11D7/08; C11D1/02; C11D1/62; C11D1/722; C11D1/88; C11D7/18; C11D7/20; C11D7/34; C23F3/03; C23G1/12
Domestic Patent References:
JPS536619B1 | 1978-03-09 | |||
JPH0452289A | 1992-02-20 | |||
JPS4974630A | 1974-07-18 | |||
JPS5315227A | 1978-02-10 |
Attorney, Agent or Firm:
Takashi Ishida
Jun Tsuruta
Nobuo Sekine
Masaya Nishiyama
Higuchi Souji
Jun Tsuruta
Nobuo Sekine
Masaya Nishiyama
Higuchi Souji