Title:
高処理能力、高精度の集積マイクロ光学・フォトニクス素子バッチの前処理、研磨、洗浄および検査用研磨システムおよびそのような研磨を用いる方法
Document Type and Number:
Japanese Patent JP2005502946
Kind Code:
A
Abstract:
The present invention describes a high throughput; high precision integrated, automated micro-optical and photonics elements polishing system for polishing a batch of work-pieces comprising a set-up and preparation station (40) for preparing said batch of work-pieces for polishing, cleaning and inspecting said batch of work-pieces prepared on said preparation station, a robotic arm (46) for moving said batch of work-pieces between said preparation station and said polishing, cleaning and inspection station (38) and within a plurality of positions of said polishing, cleaning and inspection station and a control computer (42) for controlling operation of said polishing system. The present invention also relates to methods for using said systems.
Inventors:
Sulphati, ollie
Ronen, Ichak
Ronen, Ichak
Application Number:
JP2003527532A
Publication Date:
January 27, 2005
Filing Date:
September 02, 2002
Export Citation:
Assignee:
Sagitta Engineering Solutions LDT.
International Classes:
B24B19/00; B24B19/22; B24B37/02; G02B6/25; G02B6/00; G05B19/418; (IPC1-7): G05B19/418; B24B19/00; B24B37/02; G02B6/00
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners