Title:
オゾン化水の流れおよび濃度を制御する装置および方法
Document Type and Number:
Japanese Patent JP2005523809
Kind Code:
A
Abstract:
A method for mixing fluids for process tools comprises: receiving a first fluid having a first flow and a first concentration to be supplied to a first process tool; receiving a second fluid having a second flow and second concentration; and mixing the first and the second fluid to produce a third fluid having a third flow and third concentration to be supplied to a second process tool.
More Like This:
| JP2002143867 | CARBONATED HOT WATER PREPARATION DEVICE |
| WO/1991/007907 | APPARATUS AND PROCESS FOR DISSOLUTION OF POWDER |
Inventors:
Phitkaw, Jens
Cybert, Johannes
Gottschalk, Christine
Cybert, Johannes
Gottschalk, Christine
Application Number:
JP2004500127A
Publication Date:
August 11, 2005
Filing Date:
April 25, 2003
Export Citation:
Assignee:
Applied Science and Technology, Incorporated
International Classes:
B01F1/00; C01B13/00; C01B13/10; C02F1/78; G05D21/00; H01L21/02; H01L21/304; (IPC1-7): C02F1/78; B01F1/00; C01B13/00; C01B13/10; G05D21/00; H01L21/02; H01L21/304
Domestic Patent References:
| JP2000005285A | 2000-01-11 | |||
| JPH119669A | 1999-01-19 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita