Title:
封入した黒鉛ヒーター及び方法
Document Type and Number:
Japanese Patent JP2006504242
Kind Code:
A
Abstract:
A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.
Inventors:
Mariner, John Tea
Hezil, Timothy
Hezil, Timothy
Application Number:
JP2004546915A
Publication Date:
February 02, 2006
Filing Date:
October 17, 2003
Export Citation:
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
H05B3/14; C23C14/06; H01L21/00; H01L21/02; H01L21/687; H05B3/12; H05B3/74
Attorney, Agent or Firm:
Kenichi Matsumoto
Hirokazu Ogura
Nobukazu Ito
Toshihisa Kurokawa
Hirokazu Ogura
Nobukazu Ito
Toshihisa Kurokawa