Title:
ノズル装置
Document Type and Number:
Japanese Patent JP2006522997
Kind Code:
A
Abstract:
The invention relates to a nozzle arrangement ( 1 ), in particular for the injection of a fluid into a vacuum chamber, with a nozzle channel with a predetermined internal contour, whereby the nozzle channel leads into an exit opening. It is proposed that the internal contour of the nozzle channel be shaped concavely at least in part.
Inventors:
Faubel, Manfrets
Bolff, Detreff
Tray, Jurgen
Chalbat, Ares
Abel, Bernd
Asman, Jens
Lugoboy, Eugen
Bolff, Detreff
Tray, Jurgen
Chalbat, Ares
Abel, Bernd
Asman, Jens
Lugoboy, Eugen
Application Number:
JP2006501926A
Publication Date:
October 05, 2006
Filing Date:
February 23, 2004
Export Citation:
Assignee:
Maxx-Plank-Gezelle Shaft Tool Fürdellung der Weutzsenshakhten Ahuau
Georg-August-Unibelziget Göttingen
Georg-August-Unibelziget Göttingen
International Classes:
H05G2/00; B05B1/00; B05B1/06; G21K5/08; H01L21/027; B05B1/04; H01J35/08; H01J49/04
Domestic Patent References:
| JP2005522839A | 2005-07-28 | |||
| JPH01139771A | 1989-06-01 | |||
| JP2000183045A | 2000-06-30 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama