Title:
位置合わせマークを有するインプリント・リソグラフィ・テンプレート
Document Type and Number:
Japanese Patent JP2007506281
Kind Code:
A
Abstract:
One embodiment of the present invention is an imprint template for imprint lithography that comprises alignment marks embedded in bulk material of the imprint template.
Inventors:
Bailey, Todd Sea
Johnson, Stephen Shii
Colburn, Matthew Y
Choi, Byun Jay
Smith, brian jay
Eckert, John Gi
Wilson, Carlton Giy
Sligny Vassan, Citrgata Vui
Johnson, Stephen Shii
Colburn, Matthew Y
Choi, Byun Jay
Smith, brian jay
Eckert, John Gi
Wilson, Carlton Giy
Sligny Vassan, Citrgata Vui
Application Number:
JP2006527012A
Publication Date:
March 15, 2007
Filing Date:
September 16, 2004
Export Citation:
Assignee:
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
International Classes:
H01L21/027; G03F7/00; G03F9/00; G03F
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa