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Title:
荷電粒子銃
Document Type and Number:
Japanese Patent JP2008502100
Kind Code:
A
Abstract:
An electron gun (1) includes an emitter (2), a tubular support (3) and an adaptor (4) for receiving the emitter. The adaptor includes a tapered plugging surface (7) and the tubular support includes a correspondingly tapered seating surface (9) for receiving the plugging surface. The plugging surface and seating surface have conical profiles which help to position the adaptor concentrically with the support.

Inventors:
Chan, Tao
Application Number:
JP2007514141A
Publication Date:
January 24, 2008
Filing Date:
May 13, 2005
Export Citation:
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Assignee:
Nano Beam Limited
International Classes:
H01J1/16; H01J37/06; H01J1/18; H01J3/02; H01J37/065; H01J37/067
Domestic Patent References:
JPH01260742A1989-10-18
JP2001150221A2001-06-05
JPH0573054U1993-10-05
Attorney, Agent or Firm:
Shigeo Naruse