Document Type and Number:
Japanese Patent JP2010219125
Kind Code:
A5
Application Number:
JP2009061350
Publication Date:
December 15, 2011
Export Citation:
International Classes:
H01L21/31; C23C16/455
Previous Patent: HEAT SINK, AND DEVICE AND METHOD OF MANUFACTURING THE SAME
Next Patent: ELECTROMAGNETIC INTERFERENCE SUPPRESSOR
Next Patent: ELECTROMAGNETIC INTERFERENCE SUPPRESSOR