Title:
複数のピニング方向を有する2軸磁場センサおよび該センサの製造方法
Document Type and Number:
Japanese Patent JP2011523506
Kind Code:
A
Abstract:
A fabrication process and apparatus provide a high-performance magnetic field sensor (200) from two differential sensor configurations (201, 211) which require only two distinct pinning axes (206, 216) which are formed from a single reference layer (60) that is etched into high aspect ratio shapes (62, 63) with their long axes drawn with different orientations so that, upon treating the reference layers with a properly aligned saturating field (90) and then removing the saturating field, the high aspect ratio patterns provide a shape anisotropy that forces the magnetization of each patterned shape (62, 63) to relax along its respective desired axis. Upon heating and cooling, the ferromagnetic film is pinned in the different desired directions.
Inventors:
Engel, Bradley
Mather, Philip
John Slaughter
Mather, Philip
John Slaughter
Application Number:
JP2011508715A
Publication Date:
August 11, 2011
Filing Date:
May 08, 2009
Export Citation:
Assignee:
EverSpin Technologies, Inc.
International Classes:
H01L43/12; G01R33/09; H01L43/08
Domestic Patent References:
| JP2005260064A | 2005-09-22 | |||
| JP2004006752A | 2004-01-08 | |||
| JP2008064499A | 2008-03-21 |
Foreign References:
| US20040137275A1 | 2004-07-15 |
Attorney, Agent or Firm:
Atsushi Honda
Miho Ikegami
Miho Ikegami
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