Title:
無機又は無機/有機ハイブリッドバリアフィルムの製造方法
Document Type and Number:
Japanese Patent JP2011526833
Kind Code:
A
Abstract:
A method for forming an inorganic or hybrid organic/inorganic barrier layer on a substrate, comprising condensing a vaporized metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer is provided.
Inventors:
Bright, Clark Eye.
Lions, Christopher S.
Lions, Christopher S.
Application Number:
JP2011516750A
Publication Date:
October 20, 2011
Filing Date:
June 29, 2009
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
B05D7/24; B05D3/10; B32B9/00; C23C14/12; C23C14/58; C23C16/18; C23C16/30; G02B1/11
Domestic Patent References:
| JP2002520813A | 2002-07-09 | |||
| JP2005104994A | 2005-04-21 | |||
| JP2007210208A | 2007-08-23 | |||
| JP2005060817A | 2005-03-10 | |||
| JP5576125B2 | 2014-08-20 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Satoshi Deno
Yasuyoshi Suzuki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Satoshi Deno
Yasuyoshi Suzuki