Title:
アクチュエータシステム、リソグラフィ装置、コンポーネントの位置を制御する方法、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP2012511816
Kind Code:
A
Abstract:
An actuator system is provided that is configured to move a component relative to a base of the actuator system. The actuator system may include first and second actuating elements, each including two sections of material that are joined to each other and have different coefficients of thermal expansion. The two actuating elements may be configured such that if the temperature of one is increased it applies a force on the component in a direction that is opposite to the force applied by the other actuating element if its temperature is increased. The actuator system may further include at least one power supply configured to provide independently controllable heating to the first and second actuating elements.
Inventors:
Defleece, Gosse
Buis, Edwin
Mandarin orange
Buis, Edwin
Mandarin orange
Application Number:
JP2011539984A
Publication Date:
May 24, 2012
Filing Date:
November 04, 2009
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027
Domestic Patent References:
| JP2004160650A | 2004-06-10 | |||
| JP2001138298A | 2001-05-22 | |||
| JP2004538507A | 2004-12-24 | |||
| JP2001514538A | 2001-09-11 | |||
| JP2004161002A | 2004-06-10 | |||
| JP2002218771A | 2002-08-02 | |||
| JPH01144242A | 1989-06-06 |
Foreign References:
| US20060156722A1 | 2006-07-20 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki