Title:
投影露光装置内の光学素子のための重力補償器
Document Type and Number:
Japanese Patent JP2012511821
Kind Code:
A
Abstract:
A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.
Inventors:
Norbert Muhlberger
Torsten Russell
Armin Sheppach
Jurgen Fisher
Matthias Aus
Torsten Russell
Armin Sheppach
Jurgen Fisher
Matthias Aus
Application Number:
JP2011540118A
Publication Date:
May 24, 2012
Filing Date:
December 11, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B7/198; G03F7/20
Domestic Patent References:
| JPH09275069A | 1997-10-21 | |||
| JP2005140185A | 2005-06-02 | |||
| JP2000306981A | 2000-11-02 | |||
| JP2004319682A | 2004-11-11 | |||
| JP2004281654A | 2004-10-07 | |||
| JP2003203860A | 2003-07-18 | |||
| JP2009545152A | 2009-12-17 | |||
| JP2001284438A | 2001-10-12 | |||
| JPH09275069A | 1997-10-21 | |||
| JP2005140185A | 2005-06-02 | |||
| JP2000306981A | 2000-11-02 | |||
| JP2004319682A | 2004-11-11 | |||
| JP2004281654A | 2004-10-07 | |||
| JP2003203860A | 2003-07-18 | |||
| JP2009545152A | 2009-12-17 | |||
| JP2001284438A | 2001-10-12 |
Foreign References:
| WO2006120927A1 | 2006-11-16 | |||
| WO2006120927A1 | 2006-11-16 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Tsubouchi Shin
Groundwork Kenichi
Tsubouchi Shin