Title:
スペクトル純度フィルタ、リソグラフィ装置、およびスペクトル純度フィルタを製造するための方法
Document Type and Number:
Japanese Patent JP2013527481
Kind Code:
A
Abstract:
A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation (λ<20 nm). The filter comprises a grid-like structure comprising a plurality of microscopic apertures fabricated in a carrier material such as silicon. The grid-like structure in at least part of its area is formed so as to have, within an expected range of operating conditions, a negative Poisson's ratio. By forming the grid of a material that likes to expand or contract simultaneously in orthogonal directions, the management of differential thermal expansion is improved. Various geometries are possible to achieve a negative Poisson's ratio. The aperture geometry may that of a re-entrant polygon or re-entrant shape having curved sides. Examples include a so-called re-entrant or auxetic honeycomb, in which each aperture is hexagonal, as in the regular honeycomb, but the form is a re-entrant hexagon rather than a regular hexagon.
Inventors:
Yak, martin
Sur, Wower
Sur, Wower
Application Number:
JP2012525106A
Publication Date:
June 27, 2013
Filing Date:
August 24, 2010
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G02B5/26; H01L21/027; H05G2/00
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki