Title:
ION FILTER, ION DETECTION DEVICE, AND MANUFACTURING METHOD OF ION FILTER
Document Type and Number:
Japanese Patent JP2019129015
Kind Code:
A
Abstract:
To provide an ion filter capable of suppressing waveform sharpness of a voltage applied to between electrodes.SOLUTION: An ion filter part 200 of an embodiment 2, comprises: a support layer 203; a BOX layer 202 laminated onto the support layer 203; and an electrode layer 201 containing two comb-shaped electrodes 211 and 212 laminated on the BOX layer 202, and oppositely arranged so that a plurality of comb-shaped teeth is engaged in a surface orthogonal to a lamination direction. In an ion filter, a path where a region corresponded to one part of a gap between the comb-shaped teeth of adjacent the comb-shaped electrodes 211 and 212 in the BOX layer 202 and the support layer 203 is removed and an ion can pass to the lamination direction, and the region of the support layer 203 corresponded to one part of the electrode layer 201.SELECTED DRAWING: Figure 15
Inventors:
TAN KUNIHIRO
KUBOTA SHINICHI
UJIMOTO KATSUYA
KUBOTA SHINICHI
UJIMOTO KATSUYA
Application Number:
JP2018008544A
Publication Date:
August 01, 2019
Filing Date:
January 23, 2018
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
H01J49/06; G01N27/62; H01J49/40
Domestic Patent References:
| JP2008508693A | 2008-03-21 | |||
| JP2012525698A | 2012-10-22 |
Foreign References:
| US20160025679A1 | 2016-01-28 | |||
| WO2019097234A1 | 2019-05-23 |
Attorney, Agent or Firm:
Atsushi Tateishi