Title:
STAGE DEVICE, LITHOGRAPHY DEVICE AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2020173395
Kind Code:
A
Abstract:
To provide a stage device advantageous for simultaneously realising high throughput and reduction of mold damage due to particles.SOLUTION: A stage device includes: an electromagnetic actuator including a stage surface plate having a flat surface, a stage movable part movable on the flat surface of the stage surface plate in a first direction parallel to the flat surface of the flat surface, a stator supported by the stage surface plate, and a movable element supported by the stage movable part so as to be driven in the first direction together with the stage movable part by an electromagnetic action between itself and the stator; and an adjustment part configured to adjust an installation location of the stator in a second direction orthogonal to the flat surface.SELECTED DRAWING: Figure 1
Inventors:
MARUYAMA NAOKI
Application Number:
JP2019076563A
Publication Date:
October 22, 2020
Filing Date:
April 12, 2019
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; B29C59/02; H01L21/027; H01L21/68; H02K41/03
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu