Title:
TRANSPORTER CONTROLLER AND TRANSPORTER CONTROL SYSTEM COMPRISING THE SAME
Document Type and Number:
Japanese Patent JP2021013017
Kind Code:
A
Abstract:
To provide a transporter control system for assigning work to an OHT in a multiplexed manner by considering whether or not linked transportation is possible, transportation congestion, and the like.SOLUTION: A transporter control system includes: a plurality of transporters for transporting a carrier in which a wafer is stored; and a transporter controller that controls the plurality of transporters and determines any one transporter of the plurality of transporters that is to perform a plurality of pieces of work. The transporter controller determines any one transporter by using at least one element of a first element showing whether or not linked transportation is possible and a second element showing whether or not transportation congestion exists in transportation.SELECTED DRAWING: Figure 1
Inventors:
YU SU JONG
Application Number:
JP2020108643A
Publication Date:
February 04, 2021
Filing Date:
June 24, 2020
Export Citation:
Assignee:
SEMES CO LTD
International Classes:
H01L21/677; B65G1/00
Domestic Patent References:
| JP2005122677A | 2005-05-12 | |||
| JP2002196822A | 2002-07-12 | |||
| JPH0224706A | 1990-01-26 | |||
| JPH11175153A | 1999-07-02 |
Foreign References:
| WO2017098804A1 | 2017-06-15 | |||
| WO2017090334A1 | 2017-06-01 |
Attorney, Agent or Firm:
Hatta International Patent Corporation