Title:
CLEANING DEVICE
Document Type and Number:
Japanese Patent JP2021065966
Kind Code:
A
Abstract:
To suppress a robot hand from holding a wafer held on a spinner table, by an improper holding method.SOLUTION: Control means 70 determines whether or not a holding method set for a setting part 73 and a holding method set in accordance with a size of a holding surface 27a of a spinner table 27 and a shape of an adsorption surface 156a of a robot hand 156 are identical to each other. When determining that the methods are not identical, the control means 70 notifies an operator that the methods are not identical, via a touch panel 40. This can suppress the robot hand 156 from holding a wafer W held on the holding surface 27a of the spinner table 27, by an improper holding method, so that breakage of the wafer W by the robot hand 156 can be suppressed.SELECTED DRAWING: Figure 1
Inventors:
KAWAGOE DAISUKE
Application Number:
JP2019192586A
Publication Date:
April 30, 2021
Filing Date:
October 23, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B25J13/08; H01L21/304; H01L21/677
Domestic Patent References:
| JP2011031352A | 2011-02-17 | |||
| JP2006222132A | 2006-08-24 | |||
| JP2015170689A | 2015-09-28 | |||
| JP2018140450A | 2018-09-13 | |||
| JP2005153090A | 2005-06-16 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office