Title:
SOLENOID VALVE, FLOW RATE CONTROLLER, FLUID CONTROLLER AND SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2021134909
Kind Code:
A
Abstract:
To improve sealing performance upon closing a solenoid valve.SOLUTION: A solenoid valve has an annular valve seat 17, a valve body 20 provided so as to be contactable with and separable from the valve seat 17, and a solenoid actuator 50 that drives the valve body 20. An output shaft member (55) of the solenoid actuator 50 is arranged on the central axis of the valve seat 17 so as to be displaceable in the central axis direction. The valve body 20 is attached to the tip part of the output shaft member (55) so as to be coaxial with the output shaft member (55). A sealing surface 20f that contacts the valve seat 17 of the valve body 20 is formed in a spherical shape that bulges toward the valve seat 17.SELECTED DRAWING: Figure 2
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Inventors:
AIBA DAIKI
KITANO MASASHI
HARADA AKIHIRO
KITANO MASASHI
HARADA AKIHIRO
Application Number:
JP2020033979A
Publication Date:
September 13, 2021
Filing Date:
February 28, 2020
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K1/36; F16K1/32; H01L21/02
Attorney, Agent or Firm:
Patent business corporation ken intellectual property general office