Title:
VACUUM PUMP, CONTROL DEVICE, AND CONTROL METHOD
Document Type and Number:
Japanese Patent JP2023160495
Kind Code:
A
Abstract:
To provide a vacuum pump, a control device, and a control method that can restrain the temperature of the control device from being excessively increased by stopping of cooling of the control device fixed to a vacuum pump body in a predetermined state of the vacuum pump body.SOLUTION: A vacuum pump 100 comprises a magnetic bearing type vacuum pump body 210, and a control device 200 fixed to the vacuum pump body 210. The control device 200 comprises a rotation control unit 226 for controlling the rotation of a rotor shaft 113, a temperature control unit 227 for controlling the temperature of the vacuum pump body 210, and a cooling unit 224 for cooling the control device 200. The temperature control unit 227 performs control so as to decrease the temperature of the control device 200 to a predetermined temperature or lower by decreasing a heating temperature caused by a heating unit 213 when detecting stopping of cooling in the cooling unit 224 in a predetermined state of the vacuum pump body 210.SELECTED DRAWING: Figure 5
Inventors:
ISHII KEIICHI
Application Number:
JP2022070901A
Publication Date:
November 02, 2023
Filing Date:
April 22, 2022
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Attorney, Agent or Firm:
Makito Yamada
Koji Hirokawa
Koji Hirokawa