Title:
【発明の名称】プラズマ処理装置
Document Type and Number:
Japanese Patent JP2501653
Kind Code:
B2
Inventors:
KINOSHITA HARUHISA
MATSUMOTO OSAMU
HORIE AKINOBU
MACHIDA JUNICHI
MATSUMOTO OSAMU
HORIE AKINOBU
MACHIDA JUNICHI
Application Number:
JP8528490A
Publication Date:
May 29, 1996
Filing Date:
March 30, 1990
Export Citation:
Assignee:
KINOSHITA HARUHISA
KOKUSAI DENKI KK
KOKUSAI DENKI KK
International Classes:
C23F4/00; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): H01L21/3065; C23F4/00; H01L21/203; H01L21/205
Domestic Patent References:
| JP6474725A | ||||
| JP63276226A |
Attorney, Agent or Firm:
Ishido