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Title:
【発明の名称】成膜装置
Document Type and Number:
Japanese Patent JP2509820
Kind Code:
B2
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Inventors:
NARITA NORYOSHI
MATSUSE KIMIHIRO
Application Number:
JP7299288A
Publication Date:
June 26, 1996
Filing Date:
March 25, 1988
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/28; C23C16/44; H01L21/205; H01L21/285; (IPC1-7): H01L21/285; H01L21/205
Domestic Patent References:
JP61272379A
JP6053013A
JP62291918A
JP61221372A
Attorney, Agent or Firm:
Tetsuo Kanemoto (1 person outside)



 
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