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Title:
【発明の名称】両面密着露光装置
Document Type and Number:
Japanese Patent JP2516189
Kind Code:
B2
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Inventors:
HONDA KOICHI
Application Number:
JP29401688A
Publication Date:
July 10, 1996
Filing Date:
November 21, 1988
Export Citation:
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Assignee:
NIPPON SEIKO KK
International Classes:
G03B27/02; G03F7/20; H05K3/00; (IPC1-7): G03F7/20; G03B27/02; H05K3/00
Domestic Patent References:
JP1238667A
JP1276141A
JP1312547A
JP5965849A
JP6023863U
Attorney, Agent or Firm:
Toshihiko Watanabe



 
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