Title:
【発明の名称】薄膜形成装置
Document Type and Number:
Japanese Patent JP2522987
Kind Code:
B2
Inventors:
YAMAZAKI SHUNPEI
HAMAYA TOSHIJI
HAMAYA TOSHIJI
Application Number:
JP12757988A
Publication Date:
August 07, 1996
Filing Date:
May 24, 1988
Export Citation:
Assignee:
HANDOTAI ENERGY KENKYUSHO
International Classes:
C23C16/50; C23C16/27; G03G5/08; G03G5/082; H01L21/205; H01L21/31; (IPC1-7): C23C16/50; G03G5/08; H01L21/205; H01L21/31
Domestic Patent References:
| JP60111414A | ||||
| JP5391665A | ||||
| JP52127168A |