Title:
【発明の名称】異物検査装置
Document Type and Number:
Japanese Patent JP2538338
Kind Code:
B2
Abstract:
An inspecting apparatus, for inspecting a surface state of an article to be inspected, includes a zone detecting system for detecting a zone which can cause strong scattering of light; a surface state detecting system for detecting the surface state of the article, the surface state detecting system including a light source for projecting an inspecting light beam to the article, a light scanning mechanism for relatively moving the article and the inspecting light beam so that the article is scanned with the inspecting light beam, and a photoelectric converter for detecting light from the article scanned with the inspecting light beam by the light source and the light scanning mechanism; an inspecting device for receiving an output signal from the photoelectric converter and for inspecting the surface state of the article; and a sensitivity controller for controlling the detection sensitivity of the surface state detecting system on the basis of the detection by the zone detecting system, such that when the inspecting light beam scans the zone, the detection sensitivity of the surface state detecting system is relatively reduced.
Inventors:
NATSUBORI KATSUTOSHI
KODACHI NOBUHIRO
KONO MICHIO
KODACHI NOBUHIRO
KONO MICHIO
Application Number:
JP13479689A
Publication Date:
September 25, 1996
Filing Date:
May 30, 1989
Export Citation:
Assignee:
CANON KK
International Classes:
G01N21/88; G01N21/94; G01N21/956; H01L21/027; H01L21/30; H01L21/66; G01J1/44; (IPC1-7): G01N21/88; H01L21/66
Domestic Patent References:
| JP5982726A | ||||
| JP63208746A | ||||
| JP5982727A | ||||
| JP2141646A | ||||
| JP6217645U | ||||
| JP62135751U | ||||
| JP63238454U |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)