Title:
【考案の名称】検査装置
Document Type and Number:
Japanese Patent JP2542771
Kind Code:
Y2
Inventors:
Etsuo Nagaoka
Application Number:
JP7499991U
Publication Date:
July 30, 1997
Filing Date:
September 18, 1991
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G01N29/22; G01N29/26; (IPC1-7): G01N29/26; G01N29/10
Domestic Patent References:
| JP184058U | ||||
| JP61154560U |
Attorney, Agent or Firm:
Shigefumi Okamoto (1 person outside)