Title:
【発明の名称】非対称構造FETの製造方法
Document Type and Number:
Japanese Patent JP2553690
Kind Code:
B2
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Inventors:
ISHIHARA OSAMU
Application Number:
JP3338689A
Publication Date:
November 13, 1996
Filing Date:
February 13, 1989
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L29/812; H01L21/338; (IPC1-7): H01L21/338; H01L29/812
Domestic Patent References:
JP57210675A | ||||
JP63114269A | ||||
JP59213170A | ||||
JP6381866A | ||||
JP60776A | ||||
JP63280462A | ||||
JP231428A |
Attorney, Agent or Firm:
Kenichi Hayase