Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP2560140
Kind Code:
B2
Abstract:
A semiconductor acceleration sensor comprises a semiconductor base (12) having an aperture (14) to form a first cantilever (16) having a weight (18) integral therewith, a second cantilever (20) and a third cantilever (22). The second (20) and third (22) cantilevers are formed on the opposite sides of the first cantilever (16). The semiconductor acceleration sensor also comprises first (24a) and second (24b) piezo resistors formed in the first cantilever (16), a third piezo resistor (24c) formed in the second cantilever (20), and a fourth piezo resistor (24d) formed in the third cantilever (22). The first (24a), second (24b), third (24c) and fourth (24d) piezo resistors are connected in a four-arm bridge circuit having a first pair of opposite arms comprised of the first (24a) and second (24b) piezo resistors, respectively, and a second pair of opposite arms comprised of the third (24c) and fourth (24d) piezo resistors, respectively, to compensate the first (24a) and second (24b) piezo resistors for temperature.
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Inventors:
SHINOHARA TOSHIAKI
Application Number:
JP20507290A
Publication Date:
December 04, 1996
Filing Date:
August 03, 1990
Export Citation:
Assignee:
NISSAN MOTOR
International Classes:
G01L9/04; G01L9/00; G01P15/12; H01L29/84; (IPC1-7): G01L9/04; G01P15/12; H01L29/84
Domestic Patent References:
| JP62213280A | ||||
| JP1301177A | ||||
| JP1235826A | ||||
| JP6444468U |
Attorney, Agent or Firm:
Junnosuke Nakamura (1 outside)