Title:
【考案の名称】基板搬送装置
Document Type and Number:
Japanese Patent JP2568449
Kind Code:
Y2
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Inventors:
Hideki Hayashi
Kenji Sugimoto
Kenji Sugimoto
Application Number:
JP2589593U
Publication Date:
April 15, 1998
Filing Date:
April 19, 1993
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B25J19/00; B65G43/00; B65G49/06; B65G49/07; G02F1/13; H01L21/677; H01L21/68; (IPC1-7): B65G49/07; B25J19/00; B65G43/00; B65G49/06; G02F1/13; H01L21/68
Domestic Patent References:
| JP3123696U |
Attorney, Agent or Firm:
Juichi Chatan