Title:
【考案の名称】プラズマ装置
Document Type and Number:
Japanese Patent JP2570082
Kind Code:
Y2
Inventors:
Shigeru Kobayashi
Toshiki Ebata
Yoshitaka Morioka
Tomomi Murakami
Toshiki Ebata
Yoshitaka Morioka
Tomomi Murakami
Application Number:
JP7479791U
Publication Date:
April 28, 1998
Filing Date:
August 22, 1991
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
International Classes:
H05H1/46; C23C16/50; C23C16/511; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): C23C16/50; H01L21/205; H01L21/3065; H01L21/31; H05H1/46
Domestic Patent References:
| JP63114985A | ||||
| JP3104222A |
Attorney, Agent or Firm:
Tono Kono