Title:
【考案の名称】化学気相成長装置
Document Type and Number:
Japanese Patent JP2582105
Kind Code:
Y2
Inventors:
Susumu Matsuoka
Application Number:
JP391593U
Publication Date:
September 30, 1998
Filing Date:
February 10, 1993
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
H01L21/205; C23C16/44; C30B25/02; (IPC1-7): H01L21/205; C23C16/44; C30B25/02
Domestic Patent References:
| JP410528A | ||||
| JP2222528A |
Attorney, Agent or Firm:
Kenji Onishi