Title:
【発明の名称】レーザ光を用いた微小寸法計測装置
Document Type and Number:
Japanese Patent JP2582107
Kind Code:
B2
Inventors:
FUJITA HIROO
TAKAHASHI KAZUO
TAKAHASHI KAZUO
Application Number:
JP2845588A
Publication Date:
February 19, 1997
Filing Date:
February 09, 1988
Export Citation:
Assignee:
CITIZEN WATCH CO LTD
International Classes:
G01B11/02; (IPC1-7): G01B11/02
Domestic Patent References:
| JP62194402A | ||||
| JP60224001A | ||||
| JP6061603A |