Title:
【発明の名称】電子顕微鏡におけるX線分析装置
Document Type and Number:
Japanese Patent JP2582114
Kind Code:
B2
Abstract:
There is disclosed an electron microscope having an X-ray detector that detects the X-rays emanating from a specimen placed between the upper and lower magnetic pole pieces of an objective lens in the path of an electron beam. The dimension of the detector taken longitudinally of the gap between the pole pieces is larger than the dimension of the detector taken across the gap. A heat transfer rod is inserted between the gap to cool the detector. The detector is mounted to the rod. There is also disclosed an electron microscope having an X-ray detector mounted on the side surface of a heat transfer rod which faces the path of an electron beam. The rod extends along a straight line that runs substantially perpendicular to the path remotely from the path.
More Like This:
Inventors:
TAIRA MASAYUKI
WATANABE EIICHI
WATANABE EIICHI
Application Number:
JP8100988A
Publication Date:
February 19, 1997
Filing Date:
April 01, 1988
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
G01N23/225; H01J37/244; H01J37/252; (IPC1-7): H01J37/244; G01N23/225; H01J37/252
Domestic Patent References:
| JP553129A | ||||
| JP57199847U |