Title:
【考案の名称】薄膜真空蒸発装置における原料液飛散防止構造
Document Type and Number:
Japanese Patent JP2590568
Kind Code:
Y2
Inventors:
Takayoshi Tsuchimoto
Application Number:
JP7141092U
Publication Date:
February 17, 1999
Filing Date:
September 18, 1992
Export Citation:
Assignee:
Okawara Manufacturing Co., Ltd.
International Classes:
B01D1/22; (IPC1-7): B01D1/22
Domestic Patent References:
| JP361901U | ||||
| JP5959605U |
Attorney, Agent or Firm:
Takahiko Higashiyama