【発明の名称】半導体装置の製造方法 - Philips Electronics Nemrose Fennaught Shap

Title:

【発明の名称】半導体装置の製造方法

Document Type and Number:

Japanese Patent JP2602490

Kind Code:

B2

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Inventors:

Petrus Martinus Albertus Wilhelms Morse
Theunis Hermanus Witttembohard

Application Number:

JP10825884A

Publication Date:

April 23, 1997

Filing Date:

May 28, 1984

Export Citation:

Assignee:

Philips Electronics Nemrose Fennaught Shap

International Classes:

H01L29/73; H01L21/312; H01L21/331; H01L29/72; H01L29/732; (IPC1-7): H01L21/331; H01L21/312; H01L29/73

Domestic Patent References:

Attorney, Agent or Firm:

Akihide Sugimura (1 outside)

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