Title:
【発明の名称】送光装置
Document Type and Number:
Japanese Patent JP2606227
Kind Code:
B2
Inventors:
Kamiya Saburo
Shoichi Tanimoto
Shoichi Tanimoto
Application Number:
JP22040187A
Publication Date:
April 30, 1997
Filing Date:
September 04, 1987
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B26/08; G02B26/10; G03F7/20; H01L21/027; H01L21/30; H01S3/101; (IPC1-7): G02B26/08; H01L21/027
Domestic Patent References:
| JP60200219A | ||||
| JP60200220A |
Attorney, Agent or Firm:
Masatoshi Sato