Title:
【発明の名称】ウェハースケール集積回路
Document Type and Number:
Japanese Patent JP2621577
Kind Code:
B2
Inventors:
Kazuhiko Honjo
Application Number:
JP12616090A
Publication Date:
June 18, 1997
Filing Date:
May 16, 1990
Export Citation:
Assignee:
NEC
International Classes:
H01L21/82; H01Q9/04; H04B1/40; (IPC1-7): H01L21/82; H01Q9/04; H04B1/40
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)