Title:
【発明の名称】センサターゲット
Document Type and Number:
Japanese Patent JP2641660
Kind Code:
B2
More Like This:
Inventors:
EGUCHI MASATO
KANEMITSU YOICHI
SHIRAO JUJI
MORI SATOSHI
KANEMITSU YOICHI
SHIRAO JUJI
MORI SATOSHI
Application Number:
JP27378891A
Publication Date:
August 20, 1997
Filing Date:
October 22, 1991
Export Citation:
Assignee:
EBARA SEISAKUSHO KK
International Classes:
G01B7/00; G01B11/00; G01B21/00; (IPC1-7): G01B21/00
Domestic Patent References:
JP5054352A | ||||
JP1170811A | ||||
JP63126817U | ||||
JP6410619U |
Attorney, Agent or Firm:
Toshitada Takahashi (1 outside)