Title:
【発明の名称】多層配線の形成方法
Document Type and Number:
Japanese Patent JP2646897
Kind Code:
B2
Inventors:
KISHI SHUJI
Application Number:
JP18851691A
Publication Date:
August 27, 1997
Filing Date:
July 29, 1991
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L21/3213; H01L21/3205; H01L21/768; H01L23/52; (IPC1-7): H01L21/3205
Domestic Patent References:
| JP5661145A | ||||
| JP3119789A | ||||
| JP6292339A | ||||
| JP321043A | ||||
| JP62272557A | ||||
| JP63161646A | ||||
| JP3244126A | ||||
| JP4290249A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)