Title:
【発明の名称】金属超薄膜を利用した圧電素子
Document Type and Number:
Japanese Patent JP2660166
Kind Code:
B2
Abstract:
PURPOSE: To provide a piezoelectric element composed especially of a metallic ultra-thin film in relation to a transistor using piezoelectric effect. CONSTITUTION: A piezoelectric element is composed of a piezoelectric film 14, capable of increasing a specific dynamic force by a specific voltage, an electronic path composed of a metallic ultra-thin film formed on the under side of the piezoelectric film 14 for enabling to control the electronic current by fluctuating the electronic resistance using the dynamic force of the piezoelectric film 14, as well as an electrode 16 formed on the upper side of the piezoelectric film 14 for impressing the film 14 with a specific voltage, thereby enabling it to exhibit the piezoelectric effect. In such a constitution, the dynamic force by the piezoelectric effect fluctuates the resistance in the electronic path on the under side of the piezoelectric film 14, when the space between the electrode 16 and the metallic ultra-thin film is impressed with an electric field, thereby enabling the same effect as that of an ordinary transistor to be exhibited.
Inventors:
RI SEISAI
BOKU KYOKAN
SHIN MINTETSU
BOKU KYOKAN
SHIN MINTETSU
Application Number:
JP29719494A
Publication Date:
October 08, 1997
Filing Date:
November 30, 1994
Export Citation:
Assignee:
KANKOKU DENSHI TSUSHIN KENKYUSHO
International Classes:
H01L41/08; H01L29/84; H01L41/00; (IPC1-7): H01L41/08; H01L29/84
Domestic Patent References:
| JP1204484A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)