Title:
【発明の名称】磁気センサ
Document Type and Number:
Japanese Patent JP2674088
Kind Code:
B2
Abstract:
PURPOSE:To form a glaze and a thick-film electrode under individually optimum conditions by forming the glaze on an insulating substrate in such a way that the glaze is not bonded to the thick-film electrode. CONSTITUTION:A thick-film electrode 23 and a glaze 24 which is not bonded to the thick-film electrode 23 are formed on an insulating substrate 22. An electrode film 25 such as Cu or the like is formed so as to cover at least one part of the glaze 24 and of the thick-film electrode 23. A magnetism-to-electricity conversion thin film composed of an Ni alloy thin film 26 is formed on the glaze 24 and on the electrode film 25 on the glaze. By this setup, a range of selection of a material for the glaze is made wide; the glaze whose surface smoothness is excellent can be formed. In addition, since the electrode film 25 and the magnetism-to-electricity conversion thin film 26 are not formed simultaneously, their film thickness can be set arbitrarily.
Inventors:
Toshiki Matsukawa
Koichi Yagyu
Tei Tei
Motokawa Masaru
Koichi Yagyu
Tei Tei
Motokawa Masaru
Application Number:
JP12521188A
Publication Date:
November 05, 1997
Filing Date:
May 23, 1988
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L43/08; H01L43/02; H02K11/00; (IPC1-7): H01L43/02; H01L43/08
Domestic Patent References:
| JP1262488A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)