Title:
【発明の名称】半導体装置の短絡欠陥を不動態化する方法
Document Type and Number:
Japanese Patent JP2674622
Kind Code:
B2
Abstract:
An electronic device (21) of the type including a thin film body having a superposed electrode 26) has short circuit defects (32, 32) therein passivated by a conversion process in which the electrical resistivity of the electrode material is increased proximate the defect regions. Conversion is accomplished by exposing the electrode material to a conversion reagent (38) and activating the reagent proximate the defect regions. The process may be utilized for a variety of differently configured devices, and may be readily adapted for use in a roll-to-roll device fabrication process.
Inventors:
Prem Nass
Craig Bogheri
Craig Bogheri
Application Number:
JP23090287A
Publication Date:
November 12, 1997
Filing Date:
September 14, 1987
Export Citation:
Assignee:
Energy Conversion Devices Incorporated
Canon Inc
Canon Inc
International Classes:
H01L21/28; H01L21/316; H01L31/04; H01L31/0224; H01L31/18; H01L31/20; (IPC1-7): H01L31/04; H01L21/316
Domestic Patent References:
| JP6085576A | ||||
| JP6085578A | ||||
| JP56131975A | ||||
| JP614284A | ||||
| JP6159768A |
Attorney, Agent or Firm:
Yoshikazu Tani (1 person outside)