Title:
【発明の名称】ボンディング方法及びその装置
Document Type and Number:
Japanese Patent JP2687015
Kind Code:
B2
Inventors:
Bando Akio
Zushi
Michio Okamoto
Masaki Nakanishi
Zushi
Michio Okamoto
Masaki Nakanishi
Application Number:
JP17802089A
Publication Date:
December 08, 1997
Filing Date:
July 12, 1989
Export Citation:
Assignee:
株式会社新川
株式会社日立製作所
株式会社日立製作所
International Classes:
H01L21/52; H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JP2105549A | ||||
| JP58139A |
Attorney, Agent or Firm:
Yoshinori Tanabe