Title:
【発明の名称】フォトレジストの除去方法および装置
Document Type and Number:
Japanese Patent JP2690975
Kind Code:
B2
Inventors:
Mitsuo Yoshimoto
Tanaka Jun
Murata
Tanaka Jun
Murata
Application Number:
JP28357488A
Publication Date:
December 17, 1997
Filing Date:
November 11, 1988
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G03F7/42; G01B17/00; H01L21/027; H01L21/30; (IPC1-7): G03F7/42; H01L21/027
Domestic Patent References:
| JP5856423A | ||||
| JP5881475A | ||||
| JP61159090U |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)