Title:
【発明の名称】荷電ビーム露光方法
Document Type and Number:
Japanese Patent JP2705102
Kind Code:
B2
Inventors:
Yasushi Takahashi
Shinji Miyagi
Shinji Miyagi
Application Number:
JP11317088A
Publication Date:
January 26, 1998
Filing Date:
May 10, 1988
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/30; H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP6134936A | ||||
| JP63178523A |
Attorney, Agent or Firm:
Teiichi